Inventors:
Tony D. Flaim - St. James MO, US
Jeremy McCutcheon - Rolla MO, US
Assignee:
Brewer Science Inc. - Rolla MO
International Classification:
H01L 29/02
H01L 21/306
H01L 29/84
H01L 33/00
H01L 23/495
H01L 29/86
H01L 29/20
H01L 23/498
B32B 38/00
B32B 17/06
B32B 15/04
B32B 9/00
US Classification:
257 9, 438692, 438689, 257415, 257 88, 257666, 257528, 257615, 257737, 156278, 428426, 428457, 428446, 257E2123, 257E21219, 257E29324, 257E33001, 257E29002, 257E23031, 257E29325, 257E29089, 257E2306
Abstract:
New temporary bonding methods and articles formed from those methods are provided. The methods comprise bonding a device wafer to a carrier wafer or substrate only at their outer perimeters in order to assist in protecting the device wafer and its device sites during subsequent processing and handling. The edge bonds formed by this method are chemically and thermally resistant, but can also be softened, dissolved, or mechanically disrupted to allow the wafers to be easily separated with very low forces and at or near room temperature at the appropriate stage in the fabrication process.