Robert Jacques

6872961, Mar 29, 2005

Mar 29, 2002

10/112443

Robert N. Jacques - Boston MA, US
David J. Warkentin - Boston MA, US

Cymer, Inc. - San Diego CA

G01N021/86
F16M013/00

250548, 248550

A motion control system for reducing vibration in moving components. The system includes a position control drive and a vibration control drive. At least one position sensor is used to provide feedback signals which are in turn used to provide control signals for both the position control drive and the vibration control drive. In a preferred embodiment the motion control system is applied to a stage of an integrated circuit lithography step and scan machine. The position control drives are linear magnetic actuators and the vibration control drives are electroceramic actuators. A laser interferometer position monitoring system is used to measure the position, speed, and acceleration of the stage system. Actuators apply controlled forces (based on measurements from the position monitoring system) to each stage to control the motion of the stage. Signals from the interferometer position system are also used to control vibration.

6959484, Nov 1, 2005

Jan 27, 2000

09/491969

Ronald Spangler - Arlington MA, US
Emanuele Bianchini - Charlestown MA, US
Baruch Pletner - Newton MA, US
Betsy Marsh - Brookline MA, US
Robert Jacques - Andover MA, US

Cymer, Inc. - San Diego CA

B23P021/00
H01L041/08

29709, 29720, 29721, 29729, 29740, 29744, 29 2535, 310328, 310330, 310366

A vibration control system comprising an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The actuator may comprise one or more plates or elements of electro-active material bonded to an electroded sheet.

6447416, Sep 10, 2002

Sep 14, 2000

09/664376

Robert Lionel Jacques - Troy MI
Stephen B. Pass - Utica MI

General Motors Corporation - Detroit MI

F16H 708

474111, 474140

A cam drive assembly for an automotive engine comprises a crankshaft sprocket mounted for rotation with a crankshaft, a camshaft sprocket mounted for rotation with a camshaft, and a chain rotatably operable between the crankshaft sprocket and the camshaft sprocket. A chain tensioner provides tension to the chain and is supported only by an engine block side wall. The chain tensioner is comprised of a stationary portion and a flexible spring portion supported thereto, and a nylon shoe fixed to the flexible spring portion to provide a contact surface for the chain. The stationary portion has a geometrical interlocking feature to mate with a complementary geometric feature in the engine block side wall to restrict upper and lower movement of the chain tensioner. The geometrical interlocking feature of the chain tensioner may be a concave retention portion, which fits over a complementary convex nub in the engine block side wall to restrict movement of the chain tensioner by part interference.

7039086, May 2, 2006

Jul 30, 2003

10/631349

John P. Fallon - Andover MA, US
John A. Rule - Hingham MA, US
Robert N. Jacques - San Diego CA, US
Jacob Lipcon - Winchester MA, US
Richard L. Sandstrom - Encinitas CA, US
William N. Partlo - Poway CA, US
Alexander I. Ershov - San Diego CA, US
Toshihiko Ishihara - San Diego CA, US
John Meisner - San Diego CA, US
Richard M. Ness - San Diego CA, US
Paul C. Melcher - El Cajon CA, US

Cymer, Inc. - San Diego CA

H01S 3/22

372 55, 372 57

The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. Novel control features specially adapted for a two-chamber gas discharge laser system include: (1) pulse energy controls, with nanosecond timing precision (2) precision pulse to pulse wavelength controls with high speed and extreme speed wavelength tuning (3) fast response gas temperature control and (4) Finjection controls with novel learning algorithm.

7079564, Jul 18, 2006

Jul 14, 2005

11/181258

John P. Fallon - Andover MA, US
John A. Rule - Hingham MA, US
Robert N. Jacques - San Diego CA, US
Jacob P. Lipcon - Arlington MA, US
William N. Partlo - Poway CA, US
Alexander I. Ershov - San Diego CA, US
Toshihiko Ishihara - San Diego CA, US
John Meisner - San Diego CA, US
Richard M. Ness - San Diego CA, US
Paul C. Melcher - El Cajon CA, US

Cymer, Inc. - San Diego CA

H01S 3/22

372 55

The present invention provides a control system for a modular high repetition rate two discharge chamber ultraviolet gas discharge laser. In preferred embodiments, the laser is a production line machine with a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. Novel control features specially adapted for a two-chamber gas discharge laser system include: (1) pulse energy controls, with nanosecond timing precision (2) precision pulse to pulse wavelength controls with high speed and extreme speed wavelength tuning (3) fast response gas temperature control and (4) Finjection controls with novel learning algorithm.

6454303, Sep 24, 2002

Feb 9, 2001

09/781055

Mansour Ashtiani - Beverly Hills MI
Kenneth Alan Gassman - Springboro OH
Rale Richard Wolf - Dayton OH
Robert N Jacques - Andover MA
Elizabeth M Marsh - Melrose MA
Edward Crawley - Cambridge MA

Delphi Technologies, Inc. - Troy MI
Active Control Experts, Inc. - Cambridge MA

B62D 116

280779

A method and apparatus for a damped steering assembly are provided. The damped steering assembly includes a steering wheel attached to a steering column. Disposed between the steering wheel and the steering column is an active vibration control mechanism. The active vibration control mechanism damps vibration transmitted from the steering column to the steering wheel.

7087914, Aug 8, 2006

Mar 17, 2004

10/803526

Robert P. Akins - Escondido CA, US
Richard L. Sandstrom - Encinitas CA, US
William N. Partlo - Poway CA, US
Igor V. Fomenkov - San Diego CA, US
John Martin Algots - San Diego CA, US
Robert N. Jacques - La Jolla CA, US
Frederick Palenschat - Lemon Grove CA, US
Jun Song - San Diego CA, US

Cymer, INC - San Diego CA

H01J 35/20

250504R, 2504931, 378119

An EUV light source apparatus and method are disclosed, which may comprise a pulsed laser providing laser pulses at a selected pulse repetition rate focused at a desired target ignition site; a target formation system providing discrete targets at a selected interval coordinated with the laser pulse repetition rate; a target steering system intermediate the target formation system and the desired target ignition site; and a target tracking system providing information about the movement of target between the target formation system and the target steering system, enabling the target steering system to direct the target to the desired target ignition site. The target tracking system may provide information enabling the creation of a laser firing control signal, and may comprise a droplet detector comprising a collimated light source directed to intersect a point on a projected delivery path of the target, having a respective oppositely disposed light detector detecting the passage of the target through the respective point, or a detector comprising a linear array of a plurality of photo-sensitive elements aligned to a coordinate axis, the light from the light source intersecting a projected delivery path of the target, at least one of the which may comprise a plane-intercept detection device. The droplet detectors may comprise a plurality of droplet detectors each operating at a different light frequency, or a camera having a field of view and a two dimensional array of pixels imaging the field of view. The apparatus and method may comprise an electrostatic plasma containment apparatus providing an electric plasma confinement field at or near a target ignition site at the time of ignition, with the target tracking system providing a signal enabling control of the electrostatic plasma containment apparatus.

7116695, Oct 3, 2006

Sep 28, 2004

10/953249

Robert N. Jacques - San Diego CA, US

Cymer, Inc. - San Diego CA

H01S 3/223

372 58, 372 55

An apparatus and method for producing laser output light pulses in bursts of pulses, at a selected pulse repetition rate, forming a laser output light beam, separated by an off time is disclosed, which may comprise a laser output light pulse beam parameter adjustment system, which may comprise a laser output light pulse beam parameter error detector providing a beam parameter error signal representative of the difference between the beam parameter and a selected target value for the beam parameter; a beam parameter adjustment mechanism; a beam parameter adjustment mechanism controller providing a beam parameter adjustment signal to the beam parameter adjustment mechanism based upon the value of the beam parameter error signal; a slow transient compensator providing a slow transient inversion signal modifying the beam parameter adjustment signal based upon the value of the beam parameter error signal. The apparatus and method may further comprise a beam parameter error scaling mechanism providing a normalized beam parameter error signal determined from the value of the beam parameter error signal; and the beam parameter adjustment mechanism controller and the slow transient controller providing, respectively, the beam parameter adjustment signal and the slow transient inversion signal based upon the normalized beam parameter error signal. The beam parameter adjustment mechanism controller may provide the beam parameter adjustment signal based upon a controller function that minimizes the average actual wavelength error or a windowed standard deviation of the actual wavelength error.